Atomic study on deformation behavior and anisotropy effect of 3C-SiC under nanoindentation
3C silicon carbide (3C-SiC) has great potential and value for innovated high-precision devices.However, the high hardness make it a daunting task to understand its deformation behavior and anisotropy Bread Mix effect, which impedes its processing and application.In this study, we performed molecular dynamic simulations of nanoindentation to study t